Analytical Variable Pressure FE-SEM SU6600

Hitachi's SU6600 is a new and versatile Field Emission SEM for a diversified range of applications including observations and analysis of advanced materials which have become increasingly important for modern science and engineering.

It utilizes advanced Variable Pressure (VP) technology and an improved Schottky field emission electron source that provides exceptional imaging and high probe current with great stability.

The SU6600 allows accommodation of EDX, WDX, EBSP, CL, Cooling & Cryo etc systems for versatile material analyseis in addition to high resolution imaging and materials characterization.

• Schottky electron source, up to 200nA probe current
• Field-free lens design, suitable for observation of magnetic samples and distortion-free EBSD analysis
• High Chamber Vacuum mode (10^-4 Pa)
• Variable Chamber Pressure (VP) mode (10-300Pa)
• Automated Differential Aperture for hands-off changeover between VP and High-Vacuum mode by a simple mouse-click
• Everhart-Thornly Secondary Electron Detector (SED) for high-resolution imaging
• 4+1 Segment Backscatter Electron Detector with live stream observation
• Environmental SED (ESED-II) for secondary electron collection in VP mode (option)
• Analytical Specimen Chamber for simultaneous attachment of accessories like WDS, EDS, EBSD, CL
• Specimen exchange system allows fast exchange (pumpdown time < 30s) of samples with sizes of 150mm diameter and 40mm height.
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The variable pressure (VP) mode allows the observation of wet, oily or dirty samples as well as non-conductive materials without the need of sample preparation (such as coating). The chamber pressure is continuously variable within a range of 10-300 Pa to help control sample dehydration and to eliminate charging and sample drift.

Mechanism of charge reduction in VP mode: Electrons of the primary beam ionize the gas molecules in the specimen chamber. Ions are attracted by the residual charge on the sample and neutralize that charge when reaching to the sample.
In VP mode, a differential aperture separates the high-vacuum in the electron optics from the lower vacuum in the specimen chamber. This aperture  restricts the available probe current to a maximum of 20nA, making it desirable to work in high-vacuum mode without the differential aperture to achieve the highest probe current for analytical work.
SU6600 incorporates an automated mechanism for exchange of this differential aperture, called ADAPT. This eliminates the need for an operator to manually exchange the differential aperture by hand after opening of the specimen chamber, as it is standard for competitor's systems.

To download the SU6600 instrument brochure in PDF format (3MB), click the following link:

SU6600 brochure
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To contact to Hitachi about this or other electron microscopes,

• call +49 (0)2151 64 35 300
• fax  +49 (0)2151 64 35 699
• email:  eminfo@hht-eu.com
• mail:     Hitachi High-Technologies Europe GmbH
                Nanotechnology Equipment Dept.
                Europark Fichtenhain A12
                47807 Krefeld
                Germany