Standard SEMs with Tungsten Source and Variable Chamber Pressure

Sophisticated instrumentation, range of applications, comfort of use: Our VP-SEM S-3400N/S-3700N series sets new standards with conventional scanning electron microscopes (SEM with tungsten electron source). Whereas microscopes are generally conceived and designed for high-voltage operation, we have developed the innovative Quad Bias system under our own project management. This means sharp and brilliant results can be achieved even below an accelerating voltage of 3 kV. In this way, your specimen will be protected from radiation damage and a detailed surface imaging is guaranteed. This technology also allows non-conducting and expensive preparation work. We also offer as an option our microscopes with variable chamber pressure. In contrast to standard high-vacuum chambers, this variable pressure also allows damp and organic specimen to be examined without any complications. This accelerates processing time significantly, especially in the case of major testing series. Our special patented ESED II - detector (second generation) was developed so that the secondary electrons of conducting and non-conducting specimens can be imaged in both variable pressure and high vacuum mode. Additional you find our innovative 4+1-Segment-BSE-Detector for more than 100 different modes (views). Further time saving is achieved by use of our high-performance TurboMolecularPump system, which allows the operator to achieve the desired high vacuum in the shortest possible time.

Another special feature of our innovative microscopes is that a simple press of a button will switch between variable pressure, high-vacuum and low-voltage or combine the methods. Technical adjustment and maintenance is greatly facilitated by many automated functions.

SU1510 - Compact Size VP-SEM

S-3400N - Allround VP-SEM

S-3700N - Large Chamber VP-SEM



Resolution and ALL Technical VALUES are GUARANTEED and not ONLY specified !

Hitachi High-Technologies GUARANTEES all listed specs.