Ultra-High Resolution FE-SEM

The Hitachi S-4800 is a truly versatile platform comprising impressive high resolution performance, advanced detection technology, and a user interface that makes it possible to capture even the most short lived moments accurately and clearly.
It employs a semi-in-lens design for large sample accommodation while achieving ultra-high resolution comparable to performance only available with in-lens UHR SEMs.
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• Objective lens design with "Super ExB Filter" technology. Using a single detector, the Super ExB Filter collects and separates the various components of pure SE, compositional SE and BSE electron signals.
• A guaranteed resolution of 1.4 at 1kV (deceleration) for low voltage applications. All performance specifications are guaranteed at customer's facilities.
• A choice of specimen stage: Type I for small sample applications with 50mm x 50mm stage movement or type II for large sample applications with 110mm x 110mm stage movement and computer controlled 5 axes motorization with graphical interface software.
• Advanced dry vacuum system design including Turbo Molecular Pump (TMP) = OIL-FREE.
• A new GUI design developed in consultation with users making the S-4800 the most advanced, user friendly UHR SEM available today.
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To contact to Hitachi about this or other electron microscopes,

• call        +49 (0)2151 64 35 300
• fax         +49 (0)2151 64 35 699
• email:   eminfo@hht-eu.com
• mail:     Hitachi High-Technologies Europe GmbH
               Nanotechnology Equipment Dept.
               Europark Fichtenhain A12
               47807 Krefeld
               Germany