Hitachi VP-SEM S-3400N

The S-3400N is a powerful, yet user-friendly SEM through newly developed electron optical and automated functions.
The famous Hitachi image quality convinces at high and low beam energies, and optimized detector technology provides maximum information from your sample. Variable chamber pressure allows chargeup-free observation of any sample without special preparation techniques such as coating.

• Revolutionary automatic beam axis-alignment functions (Auto Beam Setting, Auto Axial Alignment, etc.)
• High SE resolution of 10nm at 3kV
• Proprietary "Quad-Bias" offers significantly higher probe currents for brilliant imaging at selected lower accelerating voltages
• Real time, dual image display and signal mixing
• 5-axis motorized stage with high tilt (-20° ~ +90°) and allowance for tall samples (up to 80mm high)
• Analytical specimen chamber with optimum geometry for simultaneous accommodation of EDS, WDS and EBSD
• Saving floor space and electric power consumption due to TMP evacuation system
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Resolution SE	3.0nm GUARANTEED at 30kV (High Vacuum Mode) 10nm  GUARANTEED at 3kV (High Vacuum Mode)
Resolution BSE	4.0nm GUARANTEED at 30kV (Low Vacuum Mode)
Magnification	5X - 300.000X
Accelerating Voltage	0.3 - 30kV
Electron Optics	Hitachi patented Quad Bias-function instead of expensive LaB6-tips	STANDARD
Electron gun	Tungsten Emitter (Filament-change within 20 minutes)
	RELATED to POLAROID (4" X 5")
Low Vacuum Range	6 - 270Pa through quick menu	VP by one click
Image Shift	± 50µm at WD = 10mm
Objective aperture	5-Positions, ClickStop Objective Aperture
Image Shift	± 50µm at WD = 10mm
Maximum Specimen Size	200mm in diameter
Specimen Stage
Type II	X: 0 - 100mm Y: 0 - 50mm Z: 5 - 65mm R: 360° T: -20° - +90° Specimen diameter = 200mm Maximum Specimen Height: 80mm at WD = 10mm Motorized: 5 axes in standard
Detector system	Everhardt Thornley Secondary Electrons (SE) Detector	STANDARD
	High Sensitivity Semiconductor BSE Detector - 4+1-Segment	STANDARD
	EnergyDispersiveX-ray Spectrometry (EDS/EDX)	OPTION
	FF WavelengthDispersiveX-ray Spectrometer (WDX)	OPTION
	ElectronBackScatteredDiffraction-Analyzer (EBSD)	OPTION
	Cathode Luminescence Spectrometer (CL)	OPTION
	Hitachi Environmental SE Detector ESED II (2.GENERATION!!!)	OPTION
	X-ray source	OPTION
Image Display	PC with Windows XP*	STANDARD
	One or Two Flat Panel 19"	STANDARD
	640 x 480 up to 5.120 x 3.840 pixel	STANDARD
	Multiple Image formats (JPG/TIFF/BMP)	STANDARD
	Signal Mixing - Fully selectable Detector signals	STANDARD
	Dual Image Display	STANDARD
Automatic Alignment	Auto Beam Setting - Auto Axial Alignment	STANDARD
Auto Image Adjustments	Auto Focus - Auto Stigmator/Focus	STANDARD
	Auto Brightness & Contrast	STANDARD
Additionals	Oil-free evacuation system	STANDARD
	Specimen exchange with 30 SECONDS	STANDARD
	Easy-to-use software	STANDARD
	Hitachi SEM Security System	STANDARD
	Hitachi Control panel with proven Rotary Knob Set	STANDARD
	Dynamic Focus & Tilt compensation	STANDARD
	Hi Mouse - One Keyboard & One Mouse for two PC´s	STANDARD
	Several Wafer/Specimen holders are included	STANDARD

*Windows(R) XP is a registered tardemark of Microsoft Corp. USA
*Movable range of specimen stage will be limited depending on specimen size

To contact to Hitachi about this or other electron microscopes,

• call        +49 (0)2151 64 35 300
• fax        +49 (0)2151 64 35 699
• email:    eminfo@hht-eu.com
• mail:      Hitachi High-Technologies Europe GmbH
                Nanotechnology Equipment Dept.
                Europark Fichtenhain A12
                47807 Krefeld
                Germany