Defect Inspection, Review & Classification
Hitachi High-Technologies' Inline Defectivity Equipment Product Range follows the guideline of "Smart Root Cause Analysis with Quick Turn-Around Time".
State-of-the-art inline inspection equipment provides pre-classified data on relevant defect locations.
The RI-1000 sampling server analyses the data sets by means of spatial and statistical signatures and provides reduced data sets for efficient defect review.
The RS-4000EX performs fully automated defect classification with high speed and accuracy and outputs valuable information on critical defects.
Detailed Information is available under the following links:
