| Secondary electron image resolution |
3.0 nm GUARANTEED (30 kV - HV mode) |
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10.0 nm GUARANTEED (30 kV - HV mode) |
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| BackScattered electron image resolution |
4.0 nm GUARANTEED (30 kV - LV mode) |
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| Electron optics |
Hitachi patented Quad Bias-function instead of expensive LaB6-tips
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STANDARD |
| Electron gun |
Tungsten Emitter (Filament-change within 20 minutes) |
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| Accelerating Voltage |
0.3 - 30 kV |
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| Magnification |
5X - 300.000X |
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RELATED to POLAROID (4" X 5") |
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| Objective aperture |
5-Positions, ClickStop Objective Aperture |
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| Detector system |
Everhardt Thornley Secondary Electrons (SE) Detector |
STANDARD |
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High Sensitivity Semiconductor BSE Detector - 4+1-Segment |
STANDARD |
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EnergyDispersiveX-ray Spectrometer (EDX) |
OPTION |
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FF WavelengthDispersiveX-ray Spectrometer (WDX) |
OPTION |
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ElectronBackScatteredDiffraction-Analyzer (EBSD) |
OPTION |
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Cathode Luminescence Spectrometer (CL) |
OPTION |
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Environmental SE Detector ESED II (2.GENERATION!!!)
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OPTION
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X-ray source |
OPTION
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| Low Vacuum Range |
6 - 270 Pa |
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| Image Shift |
± 50µm at WD = 10mm |
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| Specimen stage |
X = 0 - 150 mm |
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Y = 0 - 110 mm |
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Z = 5.0 - 65 mm |
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R = 360° |
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T = -20° - +90° |
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Maximum Height = 110mm |
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Observable area in diameter = 203 mm with Rotation |
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Maximum specimen size in diameter = 300 mm |
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| Image display |
PC with Operating system Windows XP |
STANDARD |
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One or two 19" LCD-FLAT-PANEL |
STANDARD |
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640 x 480 up to 5.120 x 3.840 pixel |
STANDARD |
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Multiple Image formats (JPG/TIFF/BMP) |
STANDARD |
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Signal Mixing - Fully selectable Detector signals |
STANDARD |
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Dual Image Display |
STANDARD |
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| Automatic Alignment |
Auto Beam Setting - Auto Axial Alignment |
STANDARD |
| Auto Image Adjustments |
Auto Focus - Auto Stigmator/Focus |
STANDARD |
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Auto Brightness & Contrast |
STANDARD |
| Additionals |
Oil-free evacuation system |
STANDARD |
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Specimen exchange with 30 SECONDS
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STANDARD |
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Easy-to-use software (proven S-3400N GUI) |
STANDARD |
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Hitachi SEM Security System |
STANDARD |
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Hitachi Control panel with proven Rotary Knob Set |
STANDARD |
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Dynamic Focus & Tilt compensation |
STANDARD |
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Hi Mouse - One Keyboard & One Mouse for two PC´s |
STANDARD |
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Several Wafer holders are included |
STANDARD |