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Hitachi

Hitachi VP-SEM S-3700N

The Analytical SEM for Studying large, heavy & tall samples

The Hitachi S-3700N will complete our Tungsten-SEM-Portfolio with it´s large chamber capabilities and the known S-3400N features.

Many advantages from Hitachi´s Bestseller S-3400N and the versatility of the precessor model S-3600N have been unified in our NEW ANALYTICAL VP-SEM S-3700N.

Inspire the next with Hitachi!

Get convinced!
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Features

- Large Samples upt o 300mm in diameter
- Observable area up to 203mm in diameter
- Observation and EDX analysis on asample up to 110mm tall

- EDX, EBSD and WDX simultaneously avalaible
- Versatile port layout for various analytical applications
- 5-axis computer motorized stage with -20° - +90° tilt
- One-Button selctable High Vacuum (HV) / Low Vacuum (LV) Modes
- Ecological design by clean Turbo Molecular Pumping
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Secondary electron image resolution 3.0 nm   GUARANTEED  (30 kV - HV mode)  
  10.0 nm GUARANTEED  (30 kV - HV mode)  
BackScattered electron image resolution 4.0 nm   GUARANTEED  (30 kV - LV mode)  
     
Electron optics Hitachi patented Quad Bias-function instead of expensive LaB6-tips
 STANDARD
Electron gun Tungsten Emitter (Filament-change within 20 minutes)  
Accelerating Voltage 0.3 - 30 kV  
Magnification 5X - 300.000X  
  RELATED to POLAROID (4" X 5")  
Objective aperture 5-Positions, ClickStop Objective Aperture  
Detector system Everhardt Thornley Secondary Electrons (SE) Detector STANDARD
  High Sensitivity Semiconductor BSE Detector - 4+1-Segment STANDARD
  EnergyDispersiveX-ray Spectrometer (EDX) OPTION
  FF WavelengthDispersiveX-ray Spectrometer (WDX) OPTION
  ElectronBackScatteredDiffraction-Analyzer (EBSD) OPTION
  Cathode Luminescence Spectrometer (CL) OPTION
  Environmental SE Detector ESED II (2.GENERATION!!!)
OPTION
  X-ray source OPTION
     
Low Vacuum Range 6 - 270 Pa  
Image Shift ± 50µm at WD = 10mm  
     
Specimen stage X = 0 - 150 mm  
  Y = 0 - 110 mm  
  Z = 5.0 - 65 mm  
  R = 360°  
  T = -20° - +90°  
  Maximum Height = 110mm  
  Observable area in diameter = 203 mm with Rotation  
  Maximum specimen size in diameter = 300 mm  
Image display PC with Operating system Windows XP  STANDARD
  One or two 19" LCD-FLAT-PANEL  STANDARD
  640 x 480 up to 5.120 x 3.840 pixel  STANDARD
  Multiple Image formats (JPG/TIFF/BMP)  STANDARD
  Signal Mixing - Fully selectable Detector signals  STANDARD
  Dual Image Display  STANDARD
     
Automatic Alignment Auto Beam Setting - Auto Axial Alignment  STANDARD
Auto Image Adjustments Auto Focus - Auto Stigmator/Focus  STANDARD
  Auto Brightness & Contrast  STANDARD
Additionals Oil-free evacuation system  STANDARD
  Specimen exchange with 30 SECONDS
 STANDARD
  Easy-to-use software (proven S-3400N GUI)  STANDARD
  Hitachi SEM Security System  STANDARD
  Hitachi Control panel with proven Rotary Knob Set  STANDARD
  Dynamic Focus & Tilt compensation  STANDARD
  Hi Mouse - One Keyboard & One Mouse for two PC´s  STANDARD
  Several Wafer holders are included  STANDARD

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Contact and Information Inquiry

To contact to Hitachi about this or other electron microscopes,
  • call        +49 (0)2151 64 35 300
  • fax          +49 (0)2151 64 35 699
  • email:    eminfo@hht-eu.com
  • mail:      Hitachi High-Technologies Europe GmbH
                  Nanotechnology Equipment Dept.
                  Europark Fichtenhain A12
                  47807 Krefeld
                  Germany